Structural and electrical experimental studies of the carbon nonowall (CNWs) and related materials created by plasma-enhanced chemical vapor deposition (PECVD) method at different deposition temperature

Abstract

In that follows, we’ll give a brief summary of the six chapters that compound our research work: In Chapter 1 we briefly introduce different categories of nano-carbon, such as graphene, carbon nanowalls (CNWs), carbon nanofibers (CNFs) and amorphous carbon nanoparticles (CNPs) determined for their structural composition. Also, some electrical properties are described. The first section of Chapter 2 provides a brief review of the components that integrate PECVD method. Followed by the basic phenomena governing the PECVD processing for the formations and deposition mechanisms of the carbon film. Growth of the CNWs and their growth mechanism on substrate by PCVD method is refer at the end. In Chapter 3 we made a succinct description of various experimental techniques used in our paper to characterize structural and morphological carbon samples. The methods referred were Fourier Transforms Infrared Spectrometry (FT-IR), X-Ray Diffraction (XRD), Elastic Recoil Detection Analysis (ERDA) and Scanning Electron Microscope (SEM). In Chapter 4 we refer to the method of electrical measurement of nano-carbon samples. Also, we describe the Semiconductor Characterization System (SCS) device, which is used to measure electrical properties. In Chapter 5 the resulting carbon films by PCVD at different deposition temperature were characterized in terms of their molecular structure, chemical composition, morphological surface, height and hydrogen composition on surface. The bonding environment and chemical composition of the deposited films were studied by both FTIR and R-X method. The hydrogen composition on carbon surface was measured by ERDA method and the change of morphology was determined by SEM. Chapter 6 provides results of electrical measurements from carbon samples deposited on both Cr/Au and platinum electrodes. The changes of electrical properties in carbon samples at room temperature were measured by SCS method. Also, the conduction mechanism was revealed on CNWs through electrical measurements in the temperature range between 3 and 293K. Chapter 7 rounds up the overall experimental work and measurement results as a conclusion for the thesis.